Contact apparatus and semiconductor test equipment using the same

摘要

A contact apparatus includes a pusher having first and second surfaces, the first surface being connected to a pressure unit, stoppers protruding from edges of the second surface of the pusher away from the pressure unit, a pusher block having first and second surfaces facing each other, the first surface facing the pusher, and the second surface being connected to a semiconductor device, coupling members connecting the pusher to the pusher block, and a connector disposed between the pusher and the pusher block, at least part of a surface of the connector being circular, and the circular surface making a point contact with the pusher or the pusher block.

主权项

1. A contact apparatus, comprising:
a pusher having first and second surfaces, the first surface being connected to a pressure unit; stoppers protruding from edges of the second surface of the pusher away from the pressure unit; a pusher block having first and second surfaces facing each other, the first surface facing the pusher, and the second surface being connected to a semiconductor device; coupling members connecting the pusher to the pusher block; and a connector disposed between the pusher and the pusher block, at least part of a surface of the connector being curved, wherein the curved surface of the connector faces at least one of the pusher and pusher block, the curved surface of the connector making a movable point contact with the at least one of the pusher and the pusher block it faces, and wherein the coupling members are elastic and extend from the second surface of the pusher to the first surface of the pusher block, the coupling members directly contacting the first surface of the pusher block.