Magnetic recording medium including an amorphous carbon protective film

摘要

A magnetic recording medium includes a substrate; a metal film layer disposed on the substrate; a protective film disposed on the metal film layer; and a lubricant film disposed on a surface of the protective film. The protective film is composed of amorphous carbon containing fluorine and nitrogen in a surface region, and a region deeper than 0.5 nm deep from the surface of the protective film is substantially free from the fluorine and nitrogen. The fluorine and nitrogen may be each added in an amount of 5 to 20 at. %. The present invention simultaneously accomplishes a reduction in film thickness, an improvement in durability and corrosion resistance, and an improvement of the bonding strength of the surface of the protective film to the lubricating film.

主权项

1. A magnetic recording medium, comprising:
a substrate; a metal film layer disposed on the substrate; a protective film disposed on the metal film layer; and a lubricant film disposed on a surface of the protective film, wherein the protective film is comprised of amorphous carbon containing fluorine and nitrogen in a surface region, and wherein a region of the protective film deeper than 0.5 nm deep from said surface of the protective film is substantially free from the fluorine and nitrogen.