Inertial sensor

摘要

Disclosed herein is an inertial sensor. The inertial sensor includes a sensing unit and a driving-mass-position initialization module. The sensing unit includes a driving mass, a flexible board unit which displaceably supports the driving mass, and a support which supports the flexible board unit to allow the driving mass to move in a suspended state. The flexible board unit has driving electrodes which move the driving mass, and sensing electrodes which sense the movement of the driving mass. The driving-mass-position initialization module includes a position initialization member which reciprocates to initialize the position of the driving mass, and a coil unit which surrounds the position initialization member. An initialization-member-receiving depression is formed in the driving mass. The shape of the initialization-member-receiving depression corresponds to that of the position initialization member.

主权项

1. An inertial sensor, comprising:
a sensing unit comprising: a driving mass made of a magnetic body; a flexible board unit displaceably supporting the driving mass, the flexible board unit having a driving electrode for moving the driving mass and a sensing electrode for sensing the movement of the driving mass; and a support supporting the flexible board unit to allow the driving mass to move in a suspended state; and a driving-mass-position initialization unit comprising a coil disposed in the support, the coil facing the driving mass, wherein when a current is applied to the coil, the driving mass is moved so that the driving-mass-position is initialized, when the application of the current to the coil is interrupted, the driving mass is moved and oriented in a direction of gravity, and the sensing electrode senses the movement of the driving mass toward the direction of gravity.