Hot-wire sensor of submillimeter size and associated method of production

摘要

The invention relates to a submillimeter-sized hot-wire sensor (1) comprising a substrate (10), two support rods (11, 12), a metal wire (13) extending between the two ends of the support rods (11, 12), and electrical contacts (14, 15) disposed on the support rods, said contacts each being linked to one of the ends of the wire (13). The metal wire comprises at least two layers of metal materials, one of said layers being made of a material exhibiting a residual stress under tension and the other layer being made of a material exhibiting a residual stress under compression. The thicknesses of these metal layers are adapted so as to compensate the residual stresses between the various layers.

主权项

1. A submillimeter-sized hot-wire sensor comprising:
a substrate; two support rods made of nanocrystalline diamond, one portion of which is deposited on the substrate and the other portion of which extends beyond said substrate in the continuation thereof; a metal wire capable of forming the hot wire, said metal wire extending between the two ends of the support rods and comprising at least two layers of metallic materials, one of which is made of a material having a residual tensile stress and the other of which is made of a material having a residual compressive stress, the thicknesses of these metal layers being suitable for compensating for the residual stresses between the various layers in order to obtain a total residual stress of the metal wire below a limiting value; and electrical contacts positioned on the support rods, said contacts each being connected to one of the ends of the wire.