Fabrication process and package design for use in a micro-machined seismometer or other device

摘要

A method of attaching two wafers in a seismometer comprising the steps of forming a patterned wetting metal layer on a first wafer and forming a plurality of cavities mirroring the pattern of the wetting metal layer on the first wafer. The steps further include pouring a plurality of solder balls on the surface of an alignment wafer, pouring off excess solder balls, aligning the first wafer with the alignment wafer, and connecting the first wafer with the alignment wafer. The solder balls are immobilized on the wetting metal layer by performing a partial reflow onto the wetting metal layer and removing the alignment wafer. The first and second wafers are aligned so that each solder ball is immobilized between the first and second wafer. The wafers are then bonded together.

主权项

1. A method of attaching two wafers for use in a seismometer, the method comprising the steps of:
attaching two wafers in a seismometer; forming a patterned wetting metal layer on a surface of a first wafer; forming a plurality of cavities by micromachining a surface of an alignment wafer, said cavities mirroring the pattern of the wetting metal layer on the surface of said first wafer; pouring a plurality of solder balls on the surface of said alignment wafer, thereby populating each said cavity with a solder ball; pouring off excess solder balls from the surface of the alignment wafer by tilting said alignment wafer; aligning said first wafer with said alignment wafer and connecting the first wafer with the alignment wafer such that each wetting metal layer of said first wafer comes into contact with a matching solder ball of said alignment wafer; immobilizing said solder balls on the wetting metal layer of said first wafer by performing a partial reflow onto said wetting metal layer; removing said alignment wafer; forming a patterned wetting metal layer on a surface of a second wafer, said patterned wetting metal layer mirroring the pattern of the wetting metal layer on said first wafer; aligning said first wafer with said second wafer and connecting the first wafer with the second wafer such that each solder ball immobilized on said first wafer comes into contact with a matching wetting metal layer of said second wafer; and, bonding the first wafer to the second wafer by heating and reflow of said immobilized solder balls.