Chemi-epitaxy in directed self-assembly applications using photo-decomposable agents

摘要

A method of forming a layered substrate comprising a self-assembled material is provided. The method includes forming a first layer of material on a substrate, forming a layer of a radiation sensitive material on the first layer of material, imaging the layer of the radiation sensitive material with patterned light, heating the layer of the radiation sensitive material to a temperature at or above the cross-linking reaction temperature, developing the imaged layer, and forming the block copolymer pattern. The radiation sensitive material comprises at least one photo-sensitive component selected from (a) a photo-decomposable cross-linking agent, (b) a photo-base generator, or (c) a photo-decomposable base; and a cross-linkable polymer, wherein imaging by the patterned light provides a pattern defined by a first region having substantial portions of a decomposed photo-sensitive component surrounded by regions having substantial portions of intact photo-sensitive component.

主权项

1. A method of forming a layered substrate comprising a self-assembled material, comprising:
forming a first layer of material on a substrate; forming a layer of a radiation sensitive material on the first layer of material, the radiation sensitive material comprising a photo-sensitive component comprising a photo-decomposable cross-linking agent; and a cross-linkable polymer; imaging the layer of the radiation sensitive material with patterned light to form a pattern in the layer of the radiation sensitive material, wherein the pattern is defined by a first region having substantial portions of the photo-decomposable cross-linking agent decomposed, and a second region having substantial portions of the photo-decomposable cross-linking agent intact; heating the layer of the radiation sensitive material to a temperature at or above the cross-linking reaction temperature to cross-link the cross-linkable polymer in one of the first or second regions to form a cross-linked region, while the other one of the first or second regions remains as a non-crosslinked region; developing the imaged layer to remove the non-crosslinked region; and forming a block copolymer pattern comprising the self-assembled material derived from a block copolymer.