| 发明名称 | Magnetic field sensor | ||
| 摘要 | A magnetic field sensor having a support with a top side and a bottom side, whereby a Hall plate is provided on the top side of the support and the Hall plate comprises a carbon-containing layer. | ||
| 申请公布号 | US8981508(B2) | 申请公布日期 | 2015.03.17 |
| 申请号 | US201314101887 | 申请日期 | 2013.12.10 |
| 申请人 | Micronas GmbH | 发明人 | Franke Joerg |
| 分类号 | H01L29/82;H01L43/04;H01L43/06 | 主分类号 | H01L29/82 |
| 代理机构 | Muncy, Geissler, Olds & Lowe, P.C. | 代理人 | Muncy, Geissler, Olds & Lowe, P.C. |
| 主权项 | 1. A magnetic field sensor comprising: a support with a top side and a bottom side, the support being formed as a silicon substrate; a Hall plate arranged on the top side of the support; and a control unit monolithically integrated in the silicon substrate, wherein the Hall plate comprises a carbon-containing layer, wherein the Hall plate is formed above a passivation layer of the silicon substrate, wherein the Hall plate is electrically connected to the control unit, and wherein the control unit and the Hall plate are disposed in a same housing. | ||
| 地址 | Freiburg DE | ||