| 发明名称 | Method for producing an optical window device for a MEMS device | ||
| 摘要 | A method for producing an optical window device for a MEMS device, including applying a layer made of a transparent material onto a substrate having a recess, and deforming the layer so that it is folded and the deformed area of the layer forms an optical window. | ||
| 申请公布号 | US8981500(B2) | 申请公布日期 | 2015.03.17 |
| 申请号 | US201313870750 | 申请日期 | 2013.04.25 |
| 申请人 | Robert Bosch GmbH | 发明人 | Pinter Stefan |
| 分类号 | H01L21/00;H01L29/84;B81C1/00;B81B3/00 | 主分类号 | H01L21/00 |
| 代理机构 | Kenyon & Kenyon LLP | 代理人 | Kenyon & Kenyon LLP |
| 主权项 | 1. A method for producing an optical window device for a MEMS device, comprising: applying a layer of a transparent material onto a substrate having a recess; and deforming the transparent material layer so that the layer is bent into the recess and a deformed area of the layer forms an optical window; wherein an auxiliary layer is generated only on a single side of the transparent material layer, the auxiliary layer having a displaceable region which, during the deformation of the transparent material layer, is rotated into the recess about an axis of inclination and which is removed after the deforming of the transparent material layer. | ||
| 地址 | Stuttgart DE | ||