Microphone

摘要

A microphone is disclosed in which a housing is formed by a cap (13) sealed to a substrate (11). A MEMS die (10) is mounted on the substrate (11), the MEMS die (10) incorporating a membrane (12). The membrane (12) has a first surface facing the substrate and in fluid communication with an acoustic inlet port (14) in the cap (13) via an acoustic path (17) and a second surface facing the inner surface of the cap, which second surface along with part of the inner surface of the cap (13) defines at least part of a sealed chamber (19) within which a volume of air is trapped.

主权项

1. A microphone comprising:
a housing formed by a cap sealed to a substrate; a MEMS die mounted on the substrate, the MEMS die incorporating a membrane, the membrane having a first surface facing the substrate and in fluid communication with an acoustic inlet port in the cap via an acoustic path, and a second surface facing the inner surface of the cap, which second surface along with part of the inner surface of the cap defines at least part of a sealed chamber within which a volume of air is trapped; and an insert comprising an upright nozzle, the insert provided within the sealed chamber and the upright nozzle being surrounded by the sealed chamber volume; wherein the acoustic path is defined at least in part by the upright nozzle terminating at the acoustic inlet port at a first end and at a channel at the second end, the channel leading to a second chamber beneath the first surface of the membrane.