| 发明名称 | Microelectromechanical system with balanced center of mass | ||
| 摘要 | MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. A MEMS device includes a substrate and a released structure connected to the substrate via a flexure. The released structure includes a frame rotatable with respect to the substrate, and an elongate first member having a longitudinal axis extending perpendicularly from an undersurface of the frame and a free end remote from the frame. A recess is formed in an end face of the free end. The recess has a longitudinal axis substantially parallel to the longitudinal axis of the first member and a transverse area smaller than an area of the end face. | ||
| 申请公布号 | US8982440(B2) | 申请公布日期 | 2015.03.17 |
| 申请号 | US201113106693 | 申请日期 | 2011.05.12 |
| 申请人 | CALIENT Technologies, Inc. | 发明人 | Lee Chris Seung Bok |
| 分类号 | G02B26/06;G02B26/08;H02N1/00 | 主分类号 | G02B26/06 |
| 代理机构 | SoCal IP Law Group LLP | 代理人 | SoCal IP Law Group LLP ;Gunther John E.;Sereboff Steven C. |
| 主权项 | 1. A MEMS, comprising: a substrate; and a released structure connected to the substrate via a flexure, the released structure comprising: a frame rotatable with respect to the substrate, andan elongate first member having a longitudinal axis extending perpendicularly from an undersurface of the frame and a free end remote from the frame,wherein the first member comprises a recess formed in an end face of the free end, the recess having a longitudinal axis substantially parallel to the longitudinal axis of the first member, and the recess having a transverse area smaller than an area of the end face. | ||
| 地址 | Goleta CA US | ||