| 发明名称 | Piezoelectric device with electrode films and electroconductive oxide film | ||
| 摘要 | A piezoelectric device has a first electrode film, a piezoelectric film provided on the first electrode film, and a second electrode film provided on the piezoelectric film. At least one of the pair of electrode films is composed of an alloy, and a major component of the alloy is a metal selected from the group consisting of Ti, Al, Mg, and Zn. | ||
| 申请公布号 | US8981627(B2) | 申请公布日期 | 2015.03.17 |
| 申请号 | US201213487563 | 申请日期 | 2012.06.04 |
| 申请人 | TDK Corporation | 发明人 | Sakuma Hitoshi;Kurachi Katsuyuki;Aida Yasuhiro;Maejima Kazuhiko;Nakajima Mayumi |
| 分类号 | H01L41/08;H01L41/047 | 主分类号 | H01L41/08 |
| 代理机构 | Oliff PLC | 代理人 | Oliff PLC |
| 主权项 | 1. A piezoelectric device comprising: a first electrode film; a piezoelectric film provided on the first electrode film; a second electrode film provided on the piezoelectric film; and an electroconductive oxide film between the piezoelectric film and at least one of the electrode films; wherein at least one of the first and second electrode films is composed of an alloy and a major component of the alloy is one metal selected from the group consisting of Ti, Al, Mg, and Zn. | ||
| 地址 | Tokyo JP | ||