Temperature control of micromachined transducers

摘要

A micromachined structure, comprises a substrate and a cavity in the substrate. The micromachined structure comprises a membrane layer disposed over the substrate and spanning the cavity.

主权项

1. A method, comprising:
providing a substrate comprising a surface and an opposing surface, the substrate having a first coefficient of thermal expansion; forming a cavity in the substrate, the cavity comprising air; forming a membrane layer over the surface and substantially spanning the cavity, the membrane layer having a second coefficient of thermal expansion, wherein the first coefficient of thermal expansion is substantially identical to the second coefficient of thermal expansion; and forming an annular resonator over the membrane layer, the annular resonator comprising a first electrode, a second electrode, and a piezoelectric layer between the first electrode and the second electrode.