发明名称 |
Fluorine-containing aromatic compound and method for producing same |
摘要 |
Disclosed is a fluorine-containing aromatic compound represented by the following general formula (1) and its production method. In the formula (1), R1 is a hydroxyl group or amino group, each of R2 to R5 is independently a hydrogen atom, or a C1-4 straight chain or a C3 or C4 branched chain alkyl group, hydrogen atoms of the alkyl group may partially or totally be replaced with fluorine atoms, n is an integer of 0 to 2, and each of m and l is independently 0 or 1. A polymer derived from this fluorine-containing aromatic compound contains —C(CF3)2OH group at a position away from the polymer main chain. Therefore, it is useful for resist use.; |
申请公布号 |
US8981163(B2) |
申请公布日期 |
2015.03.17 |
申请号 |
US201214237651 |
申请日期 |
2012.08.08 |
申请人 |
Centrall Glass Company, Limited |
发明人 |
Nakatsuji Junya;Matsuura Makoto;Yamanaka Kazuhiro |
分类号 |
C07C39/367;C07C37/20;C07C39/19;C07C39/24 |
主分类号 |
C07C39/367 |
代理机构 |
Crowell & Moring LLP |
代理人 |
Crowell & Moring LLP |
主权项 |
1. A fluorine-containing aromatic compound represented by the general formula (1): wherein R1 is a hydroxyl group or amino group, each of R2 to R5 is independently a hydrogen atom, or a C1-4 straight chain or a C3 or C4 branched chain alkyl group, hydrogen atoms of the alkyl group may partially or totally be replaced with fluorine atoms, n is an integer of 0 to 2, and each of m and 1 is independently 0 or 1. |
地址 |
Ube-shi JP |