| 发明名称 | Inspection apparatus and inspection method | ||
| 摘要 | An inspection apparatus includes an insulating substrate, a probe pin having a body portion secured to the insulating substrate, a tip portion connected to one end of the body portion and disposed on the back surface side of the insulating substrate, and a connection portion connected to the other end of the body portion and disposed on the front surface side of the insulating substrate, and a heat-radiating terminal in contact with the connection portion, wherein a current is applied through the heat-radiating terminal and the probe pin to an object to measured, and wherein the heat-radiating terminal discharges heat from the probe pin. | ||
| 申请公布号 | US8981805(B2) | 申请公布日期 | 2015.03.17 |
| 申请号 | US201313783060 | 申请日期 | 2013.03.01 |
| 申请人 | Mitsubishi Electric Corporation | 发明人 | Okada Akira;Akiyama Hajime;Yamashita Kinya |
| 分类号 | G01R1/067;G01R31/28 | 主分类号 | G01R1/067 |
| 代理机构 | Studebaker & Brackett PC | 代理人 | Studebaker & Brackett PC |
| 主权项 | 1. An inspection apparatus comprising: an insulating substrate; a probe pin having a body portion secured to said insulating substrate, a tip portion connected to one end of said body portion and disposed on the back surface side of said insulating substrate, and a connection portion connected to the other end of said body portion and disposed on the front surface side of said insulating substrate; and a heat-radiating terminal in contact with said connection portion; wherein a current is applied through said heat-radiating terminal and said probe pin to an object to measured; and wherein said heat-radiating terminal discharges heat from said probe pin. | ||
| 地址 | Tokyo JP | ||