Optical module and optical measurement device

摘要

An optical module comprising a tunable interference filter including a first substrate, a second substrate facing the first substrate, a first reflective film formed on the first substrate, a second reflective film formed on the second substrate and facing the first reflective film, a gap changing unit changing a gap between the first reflective film and the second reflective film, and a driving electrode line electrically connected to the gap changing unit, a temperature sensor detecting temperature of the tunable interference filter and including a first sensor wiring and a second sensor wiring, the first sensor wiring being electrically connected to the driving electrode line, a switch electrically connected to the second sensor wiring, and a temperature detecting circuit electrically connected to the switch.

主权项

1. An optical module comprising:
a tunable interference filter including a first substrate, a second substrate that faces the first substrate, a first reflective film that is disposed on the first substrate, a second reflective film that is disposed on the second substrate and faces the first reflective film through a gap, a gap changing unit that changes a size of the gap, and a driving electrode line that is electrically connected to the gap changing unit; a temperature sensor that detects temperature of the tunable interference filter and has a first sensor wiring and a second sensor wiring; and a filter driving circuit unit including a driving circuit that is electrically connected to the driving electrode line and a temperature detecting circuit that is electrically connected to the second sensor wiring, to which a temperature detection signal output from the temperature sensor is input, wherein the first sensor wiring is electrically connected to the driving electrode line.