| 摘要 |
PROBLEM TO BE SOLVED: To flexibly handle variable-product variable-quantity production of manufacturing devices. SOLUTION: A device manufacturing method and a device manufacturing apparatus in a single wafer processing system with wafers in 0.5 inch size. A large number of sealed-type unit process apparatuses 1 are arranged to form a manufacturing line. The unit process apparatus 1 is portable, preferably has a standardized outline, and processes a single process in the manufacturing process. In the case where the number of a unit of manufacturing is more than the number of the unit process apparatuses, the unit process apparatuses are arranged as a flow shop system so as to correspond to the order of processes for the device. In the case where the number of the unit of manufacturing is nearly equal to the number of the unit process apparatuses, the unit process apparatuses are arranged as a class shop system for classified arrangement at every major division of orders of processes. In the case where the number of the unit of manufacturing is far less than the number of processes, the unit manufacturing apparatuses are arranged as a multicell shop system. The multicell shop system includes approximately one unit process apparatus arranged in one cell for one process type. The multicell shop system includes a plurality of the cells. |
