| 摘要 |
<p>Provided is a method for controlling a flow rate of a coating fluid and a coating apparatus capable of reducing time for controlling a flux of the coating fluid discharged from each nozzle. A plurality of branch pipes are connected to a main pipe in parallel. A coating fluid supplied to the main pipe from a supply source is supplied to one branch pipe selected from the branch pipes, and the supply of the coating fluid to other branch pipes are blocked. In this state, the flux of the coating fluid is controlled with a specific amount, and the control amount for controlling the flux to the selected branch pipe is specified. The specified control amount is compared with an initial set value, and the difference value between them is calculated. Branch pipes with a large difference value are extracted, and only the flux-controlling units of the extracted branch pipes are selected as targets of an order value for controlling flux so that the reset of all branch pipes are not required, thereby reducing time for a total calibration work. [Reference numerals] (541) Supply source; (542) Pump; (543,521a,521b,521c,521n) Filter; (544) Standard flowmeter; (545) Manifold; (546a,546b,546c,546n) Flux controlling valve; (547a,547b,547c,547n) Branch pipe flowmeter; (548a,548b,547c,548n) Opening/closing valve</p> |
