| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve durability.SOLUTION: The substrate inspection device comprises: a main body part 1 having a probe 11, a support part 12, and an electrode plate 14; a support material 2 for supporting the main body part 1; and a connection part 3 for connecting the main body part 1 and the support material 2. The main body part 1 comprises: tip end part side support plates (21a, 21b) for supporting a tip end part 11a of the probe 11; base end part side support plates (22a, 22b) for supporting a base end part 11c of the probe 11 and being fixed in a state that they contact the electrode plate 14; and a spacer 13 for maintaining a state that the tip end part side support plates and the base end part side support plates are separated. The connection part 3 connects the main body part 1 and the support material 2 in a state that there is a gap G1 between the support material 2 and the electrode plate 14, does not generate elastic force in a state that the tip end part 11a of the probe 11 does not contact a substrate Cb, and generates the elastic force in a direction regulating shrink of the gap G1 when the tip end part 11a of the probe 11 contacts the substrate Cb and a probe unit 200 is pressed.</p> |
