| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin processing apparatus whose size and weight can be reduced while suppressing liquid splash to a substrate side.SOLUTION: A spin processing apparatus 1 comprises: a liquid receiving part 6 which is annularly formed to surround a rotating substrate W while being spaced apart from its outer periphery, and which receives and holds liquid scattered from the rotating substrate W; a cup body 3 which is annularly formed to surround the liquid receiving part 6 while being spaced apart from its outer periphery, and which defines an annular outer exhaust air passage A2 for generating an air flow from the upper face of the liquid receiving part 6 along its outer periphery surface; and a partition member 7 which is annularly formed to be arranged inside the annular shape of the liquid receiving part 6, and which defines an annular inner exhaust air passage A1 for generating an air flow from the inner peripheral surface of the liquid receiving part 6 along its lower surface. |
