| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method for a device, capable of preventing reattachment of foreign matter when processing a film for frequency adjustment.SOLUTION: The manufacturing method for a device, having an oscillation element, includes: a first film formation process for forming a first film on the oscillation element; a second film formation process for forming a second film on the oscillation element; a first film processing process for cutting away the first film on the oscillation element; and a second film removal process for removing the second film from the oscillation element.</p> |
