| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and inexpensive optical measurement device in which noise caused by optical interference such as inter-layer crosstalk or speckle is suppressed.SOLUTION: The optical measurement device includes a light source emitting laser light, high-frequency superimposing means for superimposing a high-frequency current on a driving current driving the light source, a light branching element branching the laser light into signal light and reference light, an objective lens condensing the signal light on a measuring object, to irradiate it, condensing position-scanning means for scanning the condensing position of the signal light, optical path length difference adjustment means for adjusting an optical path length difference between the signal light and the reference light, an interference optical system multiplexing the signal light reflected or scattered by the measuring object with the reference light, to generate a plurality of interference lights different in a phase relation from each other, and a photodetector detecting the interference light. |
