| 摘要 |
<p>The present invention relates to a method for determining the reactive gas consumption in a coating process using plasma, comprising the following steps: a) admitting reactive gas into a coating chamber, wherein the corresponding reactive gas flow is measured and, at the same time, the partial pressure prevailing in the coating chamber is measured, without igniting a plasma; b) admitting reactive gas into a coating chamber, wherein the corresponding reactive gas flow is measured and, at the same time, the partial pressure prevailing in the coating chamber is measured, wherein a plasma is ignited. The method is characterized in that - the steps a) and b) are carried out in the case of a plurality of different reactive gas flows and thus the partial pressure dependence of the reactive gas flow can be determined both with plasma or without plasma, - in the case of a given partial pressure, deduction of the reactive gas flow value that has been determined without plasma from the reactive gas flow value that has been determined with plasma and equating the difference to the reactive gas consumption.</p> |
