积层体及其处理方法暨可挠性装置之制造方法;LAMINATED PRODUCT, TREATMENT METHOD THEREOF AND PRODUCTION METHOD OF FLEXIBLE DEVICE

摘要

本发明之目的在于提供一种积层体，其聚醯亚胺系薄膜与无机基板之密接性良好，且可容易地于短时间内将聚醯亚胺系薄膜自无机基板剥离。本发明提供一种积层体，其系具有无机基板及形成于该无机基板上之聚醯亚胺系薄膜者，且具有以下之特征：(1)聚醯亚胺系薄膜系包含聚醯亚胺系树脂层A及聚醯亚胺系树脂层B之积层薄膜，聚醯亚胺系树脂层A全面与上述无机基板相接，且形成于聚醯亚胺系树脂层A之表面之聚醯亚胺系树脂层B之一部分与上述无机基板相接；(2)聚醯亚胺系树脂层A与上述无机基板之黏着强度为2N/cm以下；(3)聚醯亚胺系树脂层B与上述无机基板之黏着强度超过2N/cm；及(4)与上述无机基板相接之聚醯亚胺系树脂层B可藉由吸湿处理而自上述无机基板剥离。; (2) a bonding strength between the polyimide-based resin layer A and the inorganic substrate is 2 N/cm or less; (3) a bonding strength between the polyimide-based resin layer B and the inorganic substrate is more than 2 N/cm; and (4) the polyimide-based resin layer B in contact with the inorganic substrate becomes possible to be debonded from the inorganic substrate by a humidifying treatment.