发明名称 |
MULTI-WIRE PROCESSING METHOD AND MULTI-WIRE PROCESSING DEVICE CAPABLE OF REDUCING WARPAGE |
摘要 |
PROBLEM TO BE SOLVED: To provide a multi-wire processing method and a multi-wire processing device capable of slicing a processing object industrially simply and easily regardless of warpage generation mechanism and capable of reducing the warpage of a cut-out plate-like body as much as possible.SOLUTION: In a multi-wire processing method and a multi-wire processing device, a processing object is cut by a multi-wire saw and is processed into a plurality of plate-like bodies. Assuming that a running direction of a saw wire is an X direction, a saw wire cutting direction in which the saw wire cuts the processing object is a Z direction, and a direction vertical to a XZ plane is a Y direction, the processing object is displaced in such a direction as to reduce a Y direction displacement amount in accordance with displacement amount change information of a Y direction displacement component of distortion of the saw wire generated during multi-wire processing. |
申请公布号 |
JP2015047673(A) |
申请公布日期 |
2015.03.16 |
申请号 |
JP20130182101 |
申请日期 |
2013.09.03 |
申请人 |
NIPPON STEEL & SUMITOMO METAL |
发明人 |
YASHIRO HIROKATSU;FUJIMOTO TATSUO;TSUGE HIROSHI;HIRANO YOSHIO;KATSUNO MASAKAZU;SATO SHINYA;USHIO MASASHI;ITO WATARU;AISATO TAKASHI;YANO TAKAYUKI |
分类号 |
B24B27/06;B28D5/04;H01L21/304 |
主分类号 |
B24B27/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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