| 摘要 |
<p>The present invention relates to a fluid shut-off valve for preventing the absorption of powder, which is capable of preventing the powder from being absorbed onto the inside of the fluid shut-off valve in a piping system in which a fluid such as a gas applied to a semiconductor manufacturing process of a semiconductor and an LCD or a chemical product manufacturing process. More specifically, the present invention relates to a fluid shut-off valve used for preventing the absorption of powder and having an improved structure. The fluid shut-off valve comprises a valve body, a shut-off part, a gas inlet part, and a gas outlet part. The valve body includes: a fluid inlet part into which a fluid flows; a fluid outlet part from which the fluid flows; and a fluid passage space part with a space formed between the fluid inlet part and the fluid outlet part and allowing the fluid to pass therethrough. The shut-off part shuts off the fluid passing through the valve body. The gas inlet part supplies a powder absorption prevention gas from the outside into the valve body in order to prevent the powder from being absorbed onto the inner circumferential surface of the valve body. The gas outlet part allows the powder absorption prevention gas supplied from the gas inlet part to flow along the inner circumferential surface of the valve body. Therefore, the fluid shut-off valve is capable of preventing the powder from being stacked or absorbed onto a sealing surface and a gap for operation therein, thereby smoothly operating the fluid shut-off valve even in the piping system in which the powder is generated.</p> |
