发明名称 缺陷检查系统及薄膜制造装置;DEFECT INSPECTION SYSTEM AND FILM MANUFACTURING APPARATUS
摘要 本发明之缺陷检查系统系包含:贴合滚筒,系将第一薄膜与第二薄膜贴合而形成薄膜;搬送生产线,系于贴合滚筒下游侧搬送薄膜;缺陷检查装置,系设置于搬送生产线;以及记录装置,系设置于搬送生产线之缺陷检查装置下游侧,将由缺陷检查装置所检测出缺陷的相关缺陷资讯记录于薄膜上;其中,缺陷检查装置系配置在搬送生产线中,并配置在贴合滚筒以外的第二薄膜之第一薄膜的反对侧之面最先接触到的滚筒之上游侧。; a transport line in which the film is transported in the downstream than the affixing roll; a defect inspection device provided in the transport line; and a recording device provided in the transport line further downstream than the defect inspection device and used to record defect information regarding a defect detected by the defect inspection device on the film; wherein the defect inspection device is provided in the transport line further upstream than a roll, other than the affixing roll, that first comes into contact with a surface of the second film which is the surface opposite to the first film.
申请公布号 TW201510512 申请公布日期 2015.03.16
申请号 TW103119218 申请日期 2014.06.03
申请人 住友化学股份有限公司 SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 井村圭太 IMURA, KEITA
分类号 G01N21/892(2006.01) 主分类号 G01N21/892(2006.01)
代理机构 代理人 赖安国王立成
主权项
地址 日本 JP