APPARATUS FOR SUPPORTING SUBSTRATE AND APPARATUS FOR INSPECTING SUBSTRATE INCLUDING THE SAME

摘要

A substrate inspecting apparatus to detect a defect in a substrate comprises: a substrate support module to support a substrate; and a substrate inspecting module arranged on the top of the substrate support module to detect a defect in a substrate. The substrate support module comprises: a base plate; a plurality of chucking blocks arranged on the base plate at regular intervals to support a substrate; and a plurality of ionizers between the chucking blocks to remove static electricity between the substrate and the chucking blocks.