| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for inspecting defect capable of inspecting a plurality of wavelengths at high speed with an inexpensive configuration.SOLUTION: An apparatus for inspecting defect comprises: a seed light generator 211 including a pulse signal generator and a polarization modulator that outputs pulse light in either one of two polarization states orthogonal to each other while synchronizing with the pulse signal; a wavelength conversion unit 220 including a branch mechanism for branching the pulse light using polarization, and a conversion unit that converts wavelength of each pulse light branched by the branch mechanism into beams of two wavelengths different from each other; illumination optical systems 3a, 3b irradiating the surface of an object to be inspected with the beams of two wavelengths different from each other, converted by the wavelength conversion unit; a detection unit detecting light that is radiated by the illumination optical systems to generate; and a signal processing system including distributors 511a, 511b distributing a signal based on the light detected by the detection unit for each wavelength on the basis of a pulse signal outputted from the pulse signal generator, and a defect determination unit processing the signal based on the light distributed by the distributors to determine the defect. |
