MANUFACTURING METHOD OF MICROLENS ARRAY SUBSTRATE, AND MANUFACTURING METHOD OF ELECTRO-OPTIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a microlens array substrate and a manufacturing method of an electro-optic device that enable suppression of removals of cracks of lens layers and alignment marks thereof.SOLUTION: A manufacturing method of a microlens array substrate 10 comprises the steps of: forming an alignment mark 17 on a top surface 11a of a substrate 11; forming a plurality of recesses 12 on the top surface 11a of the substrate 11; forming on the top surface 11a of the substrate 11 a translucent material layer 13a having a plurality of recesses 14 having a shape of the plurality of recesses 12 reflected so as to cover the alignment mark 17 and the plurality of recesses 12; forming a translucent material layer 15a having a refractive index different from the translucent material layer 13a so as to cover the translucent material layer 13a and embed the plurality of recesses 14; and implementing flatness treatment to the translucent material layer 15a so that the translucent material layer 13a is exposed at a boundary part between the plurality of adjacent recesses 14 and the alignment mark 17 is not exposed.