| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser apparatus capable of stably obtaining pulse laser light having controllability combined with high output, and high quality even when an optical axis position of an optical resonator is displaced to an electrode in a gas flow direction.SOLUTION: When a discharge area formed between a pair of electrodes is divided into a first discharge area, a second discharge area and a third discharge area, respectively, from the upstream side in a gas flow direction of laser gas, the discharge power density averaged in an optical axis direction of a laser beam in the second discharge area is smaller than that averaged in the optical axis direction of the laser beam in the first discharge area, and an optical axis of an optical resonator is provided so as to pass through the second discharge area. |
