发明名称 PHASE CHANGE MEMORY STRUCTURES AND METHODS
摘要 <p>Methods, devices, and systems associated with phase change memory structures are described herein. One method of forming a phase change memory structure includes forming an insulator material on a first conductive element and on a dielectric material of a phase change memory cell, forming a heater self-aligned with the first conductive element, forming a phase change material on the heater and at least a portion of the insulator material formed on the dielectric material, and forming a second conductive element of the phase change memory cell on the phase change material.</p>
申请公布号 KR101503188(B1) 申请公布日期 2015.03.16
申请号 KR20137006625 申请日期 2011.08.17
申请人 发明人
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
代理机构 代理人
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