CHARGED PARTICLE BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus that easily processes a sample to a needle shape while observing it in real time.SOLUTION: The charged particle beam apparatus for processing a tip end portion of a sample to a needle shape includes: an ion beam irradiation section for irradiating the tip end portion with an ion beam; an electron beam irradiation section for irradiating the tip end portion with an electron beam; a secondary electron detection section for detecting secondary electrons generated from the tip end portion by the irradiation with the electron beam; and an EBSD detection section for detecting diffracted electrons generated from the tip end portion by the irradiation with the electron beam.