MOLDING TOOL FOR NANOIMPRINT

摘要

PROBLEM TO BE SOLVED: To increase accuracy of a desired shape to be transferred and reduce the appearance of a fracture and a crack.SOLUTION: A molding tool 100 for a nanoimprint includes: a flat plate-like first mold member 10; a second mold member 20 that is provided with a plurality of through-holes 21; and a plurality of grooves 22 that are provided on one principal plane of the second mold member 20 and that are formed from one outer peripheral side surface of the second mold member 20 to the other outer peripheral side surface of the second mold member 20 via the through-holes 21. The first and second mold members 10 and 20 are integrally formed.