Resistive pressure sensor including piezo-resistive electrode

摘要

Disclosed in the present invention is a pressure sensor which comprises: an elastic thin film which has a first surface and a second surface facing each other and is made of an elastomer material, wherein multiple protruding first variable shape structures are patterned on the first surface; a first piezoresistive electrode which is formed along the surface of the multiple first variable shape structures; and a first counter electrode which is placed to face the first piezoresistive electrode. Therefore, the resistive pressure sensor can provide high sensitivity.