| 摘要 |
The present invention relates to a fail-over system of a semiconductor equipment server and a method thereof, and especially, to a technology for fail over of the equipment server managing a semiconductor manufacturing equipment. The fail-over system of a semiconductor equipment server according to the present invention may include: a semiconductor manufacturing equipment group comprising semiconductor manufacturing equipment where a semiconductor process is proceeded; an equipment server group for controlling operation of the semiconductor manufacturing equipment group; and a management server which senses a defect of the equipment server group by performing communication with the equipment server group, and performs a fail-over policy, which backs up operation data and an application processor in an equipment server which does not have a defect, in case at least one equipment server has a defect. |
