THIN FILM TRANSISTOR SUBSTRATE AND MANUFACTURING METHOD THEREOF

摘要

A thin film transistor array panel includes a first substrate, a gate line disposed on the first substrate and includes a lower layer including titanium, a middle layer including a transparent conductive material, and an upper layer including copper, a pixel electrode disposed on the first substrate and includes a lower layer including titanium, and an upper layer including the transparent conductive material, a gate insulating layer disposed on the gate line and the pixel electrode, a semiconductor layer disposed on the gate insulating layer, a data line and a drain electrode disposed on the semiconductor layer, a passivation layer which covers the data line and the drain electrode, and a common electrode disposed on the passivation layer.

主权项

1. A thin film transistor array panel comprising:
a first substrate; a gate line which is disposed on the first substrate and includes:
a lower layer including titanium;a middle layer including a transparent conductive material; andan upper layer including copper, a pixel electrode which is disposed on the first substrate and includes:
a lower layer including titanium; andan upper layer including the transparent conductive material, a gate insulating layer disposed on the gate line and the pixel electrode; a semiconductor layer disposed on the gate insulating layer; a data line and a drain electrode disposed on the semiconductor layer; a passivation layer which covers the data line and the drain electrode; and a common electrode disposed on the passivation layer