发明名称 METHOD OF MANUFACTURING METAL MASK AND METAL MASK FORMED THEREBY
摘要 Disclosed is a method of manufacturing a metal mask. A method of manufacturing a metal mask in accordance with an exemplary embodiment of the present invention includes forming through holes in a plate using a laser, by scanning the laser onto sequentially smaller overlapping portions of the plate.
申请公布号 US2015068455(A1) 申请公布日期 2015.03.12
申请号 US201414477427 申请日期 2014.09.04
申请人 Samsung Display Co., Ltd. 发明人 LEE Choong Ho;Park Tong-Jin;Lee Doh-Hyoung;Yun Sung Sik;Jeong Da Hee;Jo Jun Ho
分类号 H01L21/033;B05C21/00 主分类号 H01L21/033
代理机构 代理人
主权项 1. A method of manufacturing a metal mask, comprising: planarizing a plate; and forming through holes in the plate, each through hole being formed by scanning a laser multiple times onto a corresponding pattern region of the thin plate.
地址 Yongin-city KR