METHOD FOR FABRICATING MECHANICAL RESONATOR

摘要

PROBLEM TO BE SOLVED: To provide a micromechanical vibrator having a high Q value.SOLUTION: A method for fabricating a mechanical resonator includes the steps of: forming a sacrificial layer 102 comprising a III-V group compound semiconductor doped with nitrogen on a substrate 101; forming a vibration part forming layer 103 on the sacrificial layer; forming a vibration part 106 in the vibration part forming layer 103; and removing portions of the sacrificial layer 102 exposed to the surface by etching, and further includes the step of annealing the substrate with the sacrificial layer 102 and the vibration part forming layer 103 formed.