发明名称 NONVOLATILE SEMICONDUCTOR STORAGE DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To propose a layout resistant to infiltration of chemicals into air gaps.SOLUTION: Adjacently arranged first and second memory blocks each have a plurality of bit lines arranged for extension in a first direction, a plurality of word lines arranged for extension in a second direction perpendicular thereto, and memory cells connected thereto correspondingly. The first memory block has a first selection gate connected to one end of the memory cells, and the second memory block has a second selection gate likewise. The first and second selection gates are arranged adjacently. An end portion at one end of the first selection gate has an L-shaped portion, and an end portion at one end of the second selection gate has a straight shaped portion. First contacts are arranged in the L-shaped portion of the first selection gate. A distance in the first direction from one end portion of the first selection gate to the other end portion thereof is equal to a width of the L-shaped portion of the first selection gate in the first direction.</p>
申请公布号 JP2015046546(A) 申请公布日期 2015.03.12
申请号 JP20130178029 申请日期 2013.08.29
申请人 TOSHIBA CORP 发明人 NITTA HIROYUKI;OKUMURA YUSUKE;SETSUDA YUJI
分类号 H01L21/8247;H01L21/336;H01L21/764;H01L21/768;H01L23/532;H01L27/10;H01L27/115;H01L29/786;H01L29/788;H01L29/792 主分类号 H01L21/8247
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