THIN FILM TRANSISTOR SUBSTRATE AND METHOD OF MANUFACTURING THE THIN FILM TRANSISTOR SUBSTRATE

摘要

A thin film transistor substrate includes a base substrate, an active pattern provided on the base substrate and including a source electrode, a drain electrode and a channel between the source electrode and the drain electrode, a gate insulation layer provided on the active pattern, a gate electrode which is provided on the active pattern and overlaps the channel, a first contact pad disposed on at least one of the source electrode and the drain electrode and including a first metal, and a first non-conductive metal oxide layer on the base substrate to cover the gate electrode and including the first metal.

主权项

1. A thin film transistor substrate, comprising:
a base substrate; an active pattern provided on the base substrate and including a source electrode, a drain electrode and a channel between the source electrode and the drain electrode; a gate insulation layer provided on the active pattern; a gate electrode which is provided on the active pattern and overlaps the channel; a first contact pad disposed on at least one of the source electrode and the drain electrode and including a first metal; and a first non-conductive metal oxide layer on the base substrate to cover the gate electrode and including the first metal.