| 摘要 |
A rotary resonant three-dimensional electric field sensor is disclosed. The rotary resonant three-dimensional electric field sensor includes: a substrate (1); an X-direction electric field measurement unit (4), a Y-direction electric field measurement unit (5), and a Z-direction electric field measurement unit (6), set on the substrate (1), each of which including: a sensing electrode (8, 10, 13) fixed on the substrate (1), and a shielding electrode (7, 9, 12) vibrating relatively to the sensing electrode (8, 10, 13); and at least one set of driving mechanical structures (11, 18), is configured to generate a driving force so as to cause the shielding electrode (7, 9) to vibrate relatively to a corresponding sensing electrode (8, 10, 13), and the vibration is transferred to the shielding is electrodes (7, 9, 12) of the other two electric field measurement units (4, 5, 6). |
| 主权项 |
1. A rotary resonant three-dimensional electric field sensor comprising:
a substrate; an X-direction electric field measurement unit, a Y-direction electric field measurement unit, and a Z-direction electric field measurement unit provided on the substrate, each of which including: a sensing electrode fixed on the substrate, and a shielding electrode which is able to vibrate relative to the sensing electrode, wherein:
the shielding electrode of the Z-direction electric field measurement unit is set above a corresponding sensing electrode, so as to rotationally resonate relative to the corresponding sensing electrode;the shielding electrodes of the X-direction electric field measurement unit and the Y-direction electric field measurement unit are connected to the shielding electrode of the Z-direction electric field measurement unit by one terminal respectively so as to rotationally resonate relative to respective corresponding sensing electrodes;the shielding electrode of at least one of the X-direction electric field measurement unit, the Y-direction electric field measurement unit, and the Z-direction electric field measurement unit is connected to an anchor point fixed on the substrate via a beam structure; and at least one set of driving mechanical structures configured to generate a driving force along a resonating direction for the shielding electrode of one of the X-direction electric field measurement unit and the Y-direction electric field measurement unit, so as to cause the shielding electrode vibrate relative to its corresponding sensing electrode, and cause vibration be transferred to the shielding electrodes of the other electric field measurement units. |
