发明名称 Method for Electron Tomography
摘要 The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50-100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated.
申请公布号 US2015069231(A1) 申请公布日期 2015.03.12
申请号 US201414298919 申请日期 2014.06.07
申请人 FEI Company 发明人 Luecken Uwe;Schoenmakers Remco;van den Oetelaar Johannes Antonius Maria
分类号 H01J37/20;H01J37/28;H01J37/22 主分类号 H01J37/20
代理机构 代理人
主权项 1. A method of performing electron tomography on a sample, said sample mounted on a sample holder in an electron microscope, the electron microscope comprising an electron source for generating a beam of energetic electrons along an optical axis and optical elements for focusing and deflecting the beam so as to irradiate the sample with a beam of electrons, the sample holder capable of orienting and tilting the sample with respect to the electron beam, the method comprising: acquiring a tilt series of images by irradiating the sample with the beam of electrons, each image acquired at an associated unique tilt angle, the images recorded on a camera with a read-out speed, wherein: the tilt angle is changed continuously while acquiring the tilt series of images, anda position of the sample is changed continuously to keep the sample on the optical axis.
地址 Hillsboro OR US