发明名称 |
Method for Electron Tomography |
摘要 |
The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50-100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated. |
申请公布号 |
US2015069231(A1) |
申请公布日期 |
2015.03.12 |
申请号 |
US201414298919 |
申请日期 |
2014.06.07 |
申请人 |
FEI Company |
发明人 |
Luecken Uwe;Schoenmakers Remco;van den Oetelaar Johannes Antonius Maria |
分类号 |
H01J37/20;H01J37/28;H01J37/22 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
1. A method of performing electron tomography on a sample, said sample mounted on a sample holder in an electron microscope, the electron microscope comprising an electron source for generating a beam of energetic electrons along an optical axis and optical elements for focusing and deflecting the beam so as to irradiate the sample with a beam of electrons, the sample holder capable of orienting and tilting the sample with respect to the electron beam, the method comprising:
acquiring a tilt series of images by irradiating the sample with the beam of electrons, each image acquired at an associated unique tilt angle, the images recorded on a camera with a read-out speed, wherein:
the tilt angle is changed continuously while acquiring the tilt series of images, anda position of the sample is changed continuously to keep the sample on the optical axis. |
地址 |
Hillsboro OR US |