发明名称 |
Method of Delivering a Process Gas from a Multi-Component Solution |
摘要 |
A method and chemical delivery system are provided. The method includes providing a vapor phase of a multi-component liquid source. The method further includes contacting a pre-loaded carrier gas with the vapor phase, wherein the pre-loaded carrier gas includes a carrier gas and at least one component of the multi-component liquid source and delivering a gas stream comprising at least one component of the liquid source to a critical process or application, wherein the amount of the component in the carrier gas is sufficient to keep the ratio of components in the multi-component liquid source relatively constant. The chemical delivery system includes a multi-component liquid source having a vapor phase. The system further includes a pre-loaded carrier gas source that is in fluid contact with the vapor phase, wherein the pre-loaded carrier gas includes a carrier gas and at least one component of the liquid source and an apparatus for delivering a gas stream including at least one component of the liquid source, wherein the amount of the component in the pre-loaded carrier gas is sufficient to keep the ratio of components in the multi-component liquid source relatively constant. |
申请公布号 |
US2015068611(A1) |
申请公布日期 |
2015.03.12 |
申请号 |
US201314387872 |
申请日期 |
2013.03.14 |
申请人 |
RASIRC, Inc. |
发明人 |
Alvarez, JR. Daniel;Spiegelman Jeffrey;Holmes Russell J.;Heinlein Edward;Shamsi Zohreh |
分类号 |
B01F3/02 |
主分类号 |
B01F3/02 |
代理机构 |
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代理人 |
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主权项 |
1. A method comprising:
(a) providing a vapor phase of a multi-component liquid source; (b) contacting a pre-loaded carrier gas with the vapor phase, wherein the pre-loaded carrier gas comprises a carrier gas and at least one component of the mufti-component liquid source; and (c) delivering a gas stream comprising at least one component of the liquid source to a critical process or application;wherein the amount of the component in the carrier gas is sufficient to keep the ratio of components in the multi-component liquid source relatively constant. |
地址 |
San Diego CA US |