| 摘要 |
PROBLEM TO BE SOLVED: To provide a parting mechanism capable of parting the side end of a fragile material substrate satisfactorily.SOLUTION: A mechanism 1 for parting the end edge part of a substrate W having a scribe line SL formed in advance, along the scribe line SL comprises: a pair of clamping bodies 2 and 3 for clamping the end edge part; and an attitude changing mechanism 4 for changing the attitudes of the paired clamping bodies 2 and 3. The attitude changing mechanism 4 changes the attitudes of the paired clamping bodies 2 and 3 clamping the end edge part, thereby to apply a torque to the end edge part so that the end edge part can be parted. Moreover, one of the paired clamping bodies 2 and 3 has a protrusion part 5 at a longitudinally central part along the end edge part so that the paired clamping bodies 2 and 3 bring the protrusion part 5 into contact with the end edge part when the clamping bodies 2 and 3 clamp the end edge part for the parting operation. |
