SEMICONDUCTOR DEVICE

摘要

A semiconductor device includes an active layer, at least one source electrode, at least one drain electrode, at least one gate electrode, a first insulating layer, a first source pad, a first drain pad, at least one source plug, and at least one drain plug. The source electrode and the drain electrode are both disposed on the active layer. Projections of the source electrode and the drain electrode on the active layer form a source region and a drain region, respectively. The first source pad and the first drain pad are both disposed on the first insulating layer. A projection of the first source pad on the active layer forms a source pad region. An area of an overlapping region between the source pad region and the drain region is smaller than or equal to 40% of an area of the drain region.

主权项

1. A semiconductor device, comprising:
an active layer; at least one source electrode disposed on the active layer, an orthogonal projection of the source electrode on the active layer forming a source region; at least one drain electrode disposed on the active layer, the drain electrode being separate from the source electrode, and an orthogonal projection of the drain electrode on the active layer forming a drain region; at least one gate electrode disposed above the active layer and between the source electrode and the drain electrode; a first insulating layer at least covering a portion of the source electrode and a portion of the drain electrode, the first insulating layer having at least one source via hole and at least one drain via hole within the first insulating layer; a first source pad disposed on the first insulating layer, an orthogonal projection of the first source pad on the active layer forming a source pad region, the source pad region overlapping at least a portion of the drain region, and an area of an overlapping region between the source pad region and the drain region being smaller than or equal to 40% of an area of the drain region; a first drain pad disposed on the first insulating layer; at least one source plug filled in the source via hole and electrically connected to the first source pad and the source electrode; and at least one drain plug filled in the drain via hole and electrically connected to the first drain pad and the drain electrode.