发明名称 |
NANOPORE DEVICE INCLUDING GRAPHENE NANOPORE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
Provided are a nanopore device with resolution improved by graphene nanopores, and a method of manufacturing the same. The nanopore device includes: a first insulating layer; a graphene layer disposed on the first insulating layer and having a nanopore formed at a center portion of the graphene layer; and first and second electrode layers disposed respectively at both sides of the nanopore on a top surface of the graphene layer, wherein a center region of the first insulating layer is removed such that the center portion of the graphene layer is exposed to the outside. |
申请公布号 |
US2015069329(A1) |
申请公布日期 |
2015.03.12 |
申请号 |
US201414257654 |
申请日期 |
2014.04.21 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
JEON Tae-han;SHIM Jeo-young;EOM Kun-sun;LEE Dong-ho;LEE Joo-ho |
分类号 |
G01N27/414;H01L29/66 |
主分类号 |
G01N27/414 |
代理机构 |
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代理人 |
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主权项 |
1. A nanopore device comprising:
a first insulating layer; a graphene layer disposed on the first insulating layer and having a nanopore disposed at a center portion of the graphene layer; and first and second electrode layers disposed respectively at opposite sides of the nanopore on a top surface of the graphene layer, wherein a center region of the first insulating layer has been removed such that the center portion of the graphene layer is exposed. |
地址 |
Suwon-si KR |