发明名称 METHOD OF AND APPARATUS FOR MEASURING PRESSURE, ESPECIALLY VACUUM PRESSURE
摘要 A pressure step (ps) is applied to the interior of a compartment (1). By means of a sensor (5) which monitors the pressure within compartment (1), besides of the prevailing pressure level (Psτ), the transient step response oscillation frequency (fTSR) is registered as indicative of the gas or gas mixture present in the compartment (1).
申请公布号 WO2015032443(A1) 申请公布日期 2015.03.12
申请号 WO2013EP68566 申请日期 2013.09.09
申请人 INFICON GMBH 发明人 BERG, CHRISTIAN;WÜEST, MARTIN
分类号 G01L21/00;G01N33/00 主分类号 G01L21/00
代理机构 代理人
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