| 发明名称 |
DEVICE AND METHOD FOR BAKING SUBSTRATE |
| 摘要 |
The present disclosure relates to a device and a method for baking a substrate. The device includes a hot plate, and a supporting member for supporting a substrate to be processed, wherein the supporting member is located between the hot plate and the substrate to be processed, and can move relative to the hot plate so as to adjust the contacting position of the supporting member with the substrate to be processed. With the device, the yield of the substrate can be increased. |
| 申请公布号 |
US2015071622(A1) |
申请公布日期 |
2015.03.12 |
| 申请号 |
US201414240331 |
申请日期 |
2014.01.21 |
| 申请人 |
Shenzhen China Star Optoelectronics Technology Co. Ltd. |
发明人 |
Sun Shih Ying |
| 分类号 |
C03C23/00;H05B3/00;C03C17/32 |
主分类号 |
C03C23/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A device for baking a substrate, including:
a hot plate, and a supporting member for supporting a substrate to be processed, wherein the supporting member is located between the hot plate and the substrate to be processed, and can be moved relative to the hot plate so as to adjust the contacting position of the supporting member with the substrate to be processed. |
| 地址 |
Shenzhen, Guangdong CN |
