发明名称 THERMAL SUBSTITUTION POWER MEASUREMENT SYSTEM WITH RF SELF-HEATING TEMPERATURE SENSOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a method that internally performs a self-heating of a crystal oscillator-based electronic thermometer in a thermal substitution power or thermal measurement system.SOLUTION: A thermal substitution power measurement system 100 includes: an electromechanically-resonant temperature sensor 110; a temperature measurement circuit 120 that is coupled to the temperature sensor 110; an RF power source 130; and a power controller 140. The temperature measurement circuit 120 generates a temperature signal according to a first frequency. The RF power source delivers to the temperature sensor 110 an RF power of a controllable level at a second frequency corresponding to a resonance of the temperature sensor 110 and outputs a magnitude of the RF power to be delivered to the temperature sensor 110. In response to the temperature signal, the power controller 140 controls the RF power to be delivered to the temperature sensor 110, and operates so as to maintain the temperature signal constant notwithstanding variations in an external power input to the temperature sensor.</p>
申请公布号 JP2015045639(A) 申请公布日期 2015.03.12
申请号 JP20140164785 申请日期 2014.08.13
申请人 KEYSIGHT TECHNOLOGIES INC 发明人 KARLQUIST RICHARD K
分类号 G01K7/32;H01L41/04;H01L41/09;H03B5/32;H03H9/19 主分类号 G01K7/32
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