发明名称 |
INTERNALLY GENERATED DFT STEPPED HYSTERESIS SWEEP FOR ELECTROSTATIC MEMS |
摘要 |
The present invention generally relates to a mechanism for testing a MEMS hysteresis. A power management circuit may be coupled to the electrodes that cause the movable plate that is disposed between the electrodes in a MEMS device to move. The power management circuit may utilize a charge pump, a comparator and a resistor ladder. |
申请公布号 |
WO2015035120(A1) |
申请公布日期 |
2015.03.12 |
申请号 |
WO2014US54213 |
申请日期 |
2014.09.05 |
申请人 |
CAVENDISH KINETICS, INC |
发明人 |
HUFFMAN, JAMES DOUGLAS;KHIEU, CONG QUOC;VAN KAMPEN, ROBERTUS PETRUS;SMAYLING, KARL F.;JOSHI, VIKRAM |
分类号 |
B81C99/00;H01G5/16 |
主分类号 |
B81C99/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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